Support of KLA-Tencor Prometrix Systems
Support of KLA-Tencor Prometrix Systems
Semiconductors are electronic components that use of the electronic properties of semiconductor materials. Vacuum tubes replaced by devices with semiconductor materials are in most applications. Vacuum devices semiconductor solid state instead of the gaseous state or thermionic emission.
Semiconductor devices are manufactured both as single and discrete devices. They are engineered and manufactured integrated circuits. Integrated circuits are designed for a few songs to millions of devices manufactured and united on a semiconductor substrate only.
Earlier in the semiconductor material silicon has been widely used because of the availability of raw materials at relatively low and treatment is simple. Germanium has been widely used in the early semi-conductor, but was considered less Littler silicone. Gallium arsenide has also been widely used when a high speed primary equipment was. However, it is difficult to form a large diameter balls of material. Silicon carbide indium and other compounds such as indium arsenide, indium antimonide and indiumfosfide, etc. were also used.
The KLA-Tencor Prom Trix Systems are specifically designed for applications to contest the thing film available today. Measurement capabilities and advanced algorithms seedless as simultaneous multi-diffusion layer used in the manufacture of more efficient equipment. The reflectivity curves and gamma in the system to resist the client for use with L and UV-Steps Online. This also allows the customer to track the variations and features anti-glare coating.
KLA-Tencor Prom Trix RS75/TCA four points of the sensor system consists RS75/TCA model with a four points is fully automatic temperature compensation. The benefits of temperature compensation includes changes in temperature can lead to resistance of the plate with a maximum of one percent per degree Celsius. Correct for these temperature fluctuations will affect the long-term repeatability, accuracy and a system to match. With temperature compensation 49 site contour maps can be obtained through a wafer loading manual and test in less than 60 seconds.
The KLA-Tencor Prom Trix System offers a throughput of over 100wafers per hour and up to 20 mm wafers. Speed is an overall measure seconds per site. Prom Trix This system provides an accurate measurement of wafer sheet resistance monitor at a speed improved. Follow up of the wafer is significantly improved compared to older systems with high productivity in minimum time.
Prom Trix These systems are ideal for a wide range of applications processing semiconductors such as ion implantation, diffusion, bulk silicon, metal deposition, CMP, EPI, RTP, etc. .. The display system contains contour maps Trix Prom, 3-Dimensional plots and diameter scans. These systems are aligned and refurbishment to meet original specifications and performance than the current system.
